238000006011 modification reaction Methods 0.000 description 2.238000004422 calculation algorithm Methods 0.000 description 2.229910021420 polycrystalline silicon Inorganic materials 0.000 description 3.239000012528 membrane Substances 0.000 claims description 3.230000005669 field effect Effects 0.000 claims description 4.230000000881 depressing Effects 0.000 claims description 5.238000009530 blood pressure measurement Methods 0.000 claims description 15.230000035945 sensitivity Effects 0.000 claims abstract description 31.Assignors: BELLWOOD, THOMAS ALEXANDER, RUANO, JULIO ELOY, RUTKOWSKI, MATTHEW FRANCIS, STERLING, MERLE DOUGLAS Publication of US20030208324A1 publication Critical patent/US20030208324A1/en Application granted granted Critical Publication of US6684166B2 publication Critical patent/US6684166B2/en Status Expired - Fee Related legal-status Critical Current Anticipated expiration legal-status Critical Links Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.) Filing date Publication date Application filed by International Business Machines Corp filed Critical International Business Machines Corp Priority to US10/138,899 priority Critical patent/US6684166B2/en Assigned to INTERNATIONAL BUSINESS MACHINES CORPORATION reassignment INTERNATIONAL BUSINESS MACHINES CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Original Assignee International Business Machines Corp Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.) ( en Inventor Thomas Bellwood Julio Ruano Matthew Rutkowski Merle Sterling Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.) Granted Application number US10/138,899 Other versions US6684166B2 Google Patents US20030208324A1 - Pressure sensitive keyboard US20030208324A1 - Pressure sensitive keyboard
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